Optical: systems and elements – Optical modulator – Having particular chemical composition or structure
Reexamination Certificate
2006-05-02
2006-05-02
Thompson, Timothy (Department: 2873)
Optical: systems and elements
Optical modulator
Having particular chemical composition or structure
C315S155000, C428S690000
Reexamination Certificate
active
07038836
ABSTRACT:
To provide a process of successively forming from an EL layer, a cathode, a barrier layer and a cover layer in the same multi-chamber. By using a same film deposition method to form the EL layer and the cover layer, as shown in FIG.1A, the EL layer, the cathode, the barrier layer, and the cover layer can be formed in the same multi-chamber in succession. Thus, as shown in FIG.1B, a sealed structure of an EL element can be formed.
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Shibata Noriko
Yamazaki Shunpei
Fish & Richardson P.C.
Semiconductor Energy Laboratory Co,. Ltd.
Thompson Timothy
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