Self-diagnostic accelerometer with symmetric proof-mass and its

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element

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7351434, 7351433, 73 139, G01P 1500

Patent

active

059271434

ABSTRACT:
A symmetrical proof-mass accelerometer with a self-diagnosis capability and its fabrication method are disclosed. The accelerometer has symmetrical mass distribution with respect to the plane of the cantilever beam with an offset between upper and lower masses, so as to minimize cross-axis sensitivity and facilitate self-diagnostic resistor installation. This accelerometer can be applied to automobile electronics systems, consumer electronics, and industrial electrical measurement systems, in which the measurements of displacement, velocity, vibration, acceleration, angular acceleration and their changes are required.

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patent: 5350189 (1994-09-01), Tsuchitani et al.
patent: 5777227 (1998-07-01), Cho et al.

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