Self-contained hot-hollow cathode gun source assembly

Details Self-contained hot-hollow cathode gun source assembly Self-contained hot-hollow cathode gun source assembly

1984-08-03

1986-10-28

Niebling, John F.

Electric heating

Metal heating

By arc

204298, 118726, 219121EF, B23K 900

Patent

active

046200819

ABSTRACT:
A self-contained hot-hollow cathode gun source assembly for use in a vacuum chamber includes a crucible block having a hot-hollow cathode gun mounted underneath and providing a hole for the magnetic deflection of the ion/electron beam into a crucible on top the block.

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J. Luce, "Intense Gaseous Discharges", Proceedings of Second U.N. Conference on Peaceful Use of Atomic Energy (1958) 31, 305.
Lidsky et al., "Highly Ionized Hollow Cathode Discharge", J. of Applied Physics, vol. 33, #8, 8/1962, pp. 2490-2497.
Morley, "The Hollow Cathode Discharge", Proceedings of the 5th Annual Meeting of the Electron Symposium, 3/1963.
Wan et al., "Investigation of Hot-Filament and Hollow-Cathode Electron Beam Techniques for Ion Plating", J. of Vac. Science and Technology, vol. 8, #6, 1971, p. 99.
D. Williams, "Vacuum Coating With A Hollow Cathode Source", J. Vac. Sci. Technol., vol. 11, #1, Jan./Feb. 1974, pp. 374-376.
G. Mah, "PVD by Electron Beam Processes", 1983, Plating and Surface Finishing Journal of Amer. Electroplater's Society.

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