Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent
1986-03-07
1988-03-01
Kittle, John E.
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
428333, 428458, 428500, 428524, G03F 900
Patent
active
047285915
ABSTRACT:
Articles exhibiting fabricated structures with nanometer size scale features (nanostructures), typically a device comprising nanostructures of a functional material on or in a substrate of dissimilar material, are produced by a method employing a substrate base or coating and a thin layer serving as a lithographic mask or template, consisting of a self-assembled ordered material array, typically a periodic array of molecules such as undenatured proteins, exhibiting holes, thickness or density variations. It is possible to produce complex structures containing large numbers of nanometers scale elements through a small number of simple steps.
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Clark Noel A.
Douglas Kenneth
Rothschild Kenneth J.
Kittle John E.
Ryan Patrick J.
Trustees of Boston University
University of Colorado Foundation Inc.
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