Self-assembled monolayer coating for micro-mechanical devices

Details Self-assembled monolayer coating for micro-mechanical devices Self-assembled monolayer coating for micro-mechanical devices

1994-06-30

1996-06-04

Ben, Loha

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359291, 359224, 359298, 427534, G02B 2600

Patent

active

055238785

ABSTRACT:
A method of forming of a monomolecular coating (19) for surfaces of contacting elements (11, 17) of micro-mechanical devices (10), specifically, devices that have moving elements that contact other elements and that tend to stick as a result of the contact. The method uses liquid deposition, with the device being placed in a solution that contains a precursor to the formation of the coating. The precursor is chosen based on coordination chemistry between the precursor and the surface to be coated.

REFERENCES:
patent: 5331454 (1994-07-01), Hornbeck
patent: 5411769 (1995-05-01), Hornbeck
Colin D. Bain and George M. Whitesides, "Molecular-Level Control over Surface Order in Self-Assembled Monolayer Films of Thiols on Gold", Science, vol. 240, 1 Apr. 1988, pp. 62-63.
Paul E. Laibinis, James J. Hickman, Mark S. Wrighton, George M. Whitesides, "Orthogonal Self-Assembled Monolayers: Alkanethiols on Gold and Alkane Carboxylic Acids on Alumina", Science, vol. 245, 25 Aug. 1989, pp. 845-847.

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