Optical waveguides – With optical coupler – Switch
Reexamination Certificate
2005-02-22
2005-02-22
Prasad, Chandrika (Department: 2839)
Optical waveguides
With optical coupler
Switch
C385S025000
Reexamination Certificate
active
06859577
ABSTRACT:
A method and apparatus are described for reducing stiction in a MEMS device having a movable element and a substrate. The method generally comprises providing the substrate with an anti-stiction member and interposing the anti-stiction member between the moveable element and the substrate. The apparatus generally comprises an anti-stiction member that is interposable between the moveable element and the substrate. Another embodiment of the invention of the invention is directed to a MEMS device, comprising: a substrate, a moveable element moveably coupled to the substrate, and an anti-stiction member that is interposable between the moveable element and the substrate. A further embodiment of the invention is directed to an optical switch having one or more moveable elements moveably coupled to a substrate, and an anti-stiction member that is interposable between at least one of the moveable elements and the substrate. The anti-stiction member may be in the form of a flexible cantilevered structure that overhangs the moveable element. Actuating the moveable element causes the anti-stiction member to flex and snap into place between the moveable element and the substrate. An additional embodiment of the invention is directed to a method of fabricating a MEMS device. The method proceeds by providing a silicon-on-insulator (SOI) substrate; defining a moveable element from a device layer of the SOI substrate; and depositing a flexible material over the device layer and the moveable element. One or more portions of the flexible material overhang the moveable element, whereby the flexible material forms one or more anti-stiction members.
REFERENCES:
patent: 5411769 (1995-05-01), Hornbeck
patent: 5512374 (1996-04-01), Wallace et al.
patent: 5629918 (1997-05-01), Ho et al.
patent: 5867302 (1999-02-01), Fleming
patent: 6025951 (2000-02-01), Swart et al.
patent: 6114044 (2000-09-01), Houston et al.
patent: 6215921 (2001-04-01), Lin
patent: 6341039 (2002-01-01), Flanders et al.
patent: 6396975 (2002-05-01), Wood et al.
patent: 6498870 (2002-12-01), Wu et al.
patent: 6523961 (2003-02-01), Ilkov et al.
patent: 6538798 (2003-03-01), Miller et al.
patent: 6600591 (2003-07-01), Anderson et al.
patent: 6639572 (2003-10-01), Little et al.
patent: 6668109 (2003-12-01), Nahum et al.
patent: 6674562 (2004-01-01), Miles
R. Legtenberg et al., “Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms”,Sensors and Actuators A, 43, pp 230-238, 1994.
H. Guckel et al, “Fabrication of Micromechanical Devices from Polysilicon Films with Smooth Surfaces”,Sensors and Actuators, 20 pp 117-122 (1989).
R. Alley et al, “The Effect of Release-Etch Processing on Surface Microstructure Stiction”, Proc. IEEE Solid-State Sensor & Actuator Workshop, Hilton Head Island, S.C., pp. 202-207 (1992).
D. Kobayashi et al., “An Integrated Lateral Tunneling Unit” Proc. IEEE Micro Electro Mechanical Systems, Travemunde Germany, pp 214-219, (1992).
N. Takeshima et al. Proc. Int. Conf. Solid-State Sensors & Actuators (Transducers '91), San Francisco, CA, pp. 63-66, (1991, IEEE, New York)).
C. Mastrangelo and C. Hsu, “Mechanical Stability and Adhesion of Microstructures Under Capillary Forces—Part I: Basic Theory”Journal of Microelectromechanical Systems, vol. 2, No. 1 (Mar. 1993) pp. 33-43.
C. Mastrangelo and C. Hsu, “Mechanical Stability and Adhesion of Microstructures Under Capillary Forces—Part II: Experiments”Journal of Microelectromechanical Systems, vol. 2, No. 1, (Mar. 1993) pp. 44-55.
Storment, C., Flexible, Dry-Released Process for Aluminum Electrostatic Actuators, Sep. 1994, pp. 90-96.
Provisional Patent Application of Behrang Behin et al., “Global Mechanical Stop for Precise Positioning of a Field of Mirrors”, filed Mar. 9, 1999.
L. Y. Lin, et al, Free Space Micromachined Optical Switches with Submillisecond Switching Time for Large-Scale Optical Crossconnects, IEEE Photonics Technology Letters, vol. 10, No. 4, Apr. 1998.
U.S. Appl. No. 09/489,264 of Robert L. Wood et al, “MEMS Optical Cross-Connect Switch”, filed Jan. 20, 2000.
U.S. Appl. No. 09/511,428 of Behrang Behin et al, “Cantilevered Microstructure Methods and Apparatus”, filed Feb. 23, 2000.
Analog Devices Inc.
Isenberg Joshua D.
JDI Patent
Prasad Chandrika
LandOfFree
Self assembled micro anti-stiction structure does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Self assembled micro anti-stiction structure, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Self assembled micro anti-stiction structure will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3469562