Self-alignment method of making

Details Self-alignment method of making Self-alignment method of making

2000-04-20

2002-01-01

Pham, Long (Department: 2823)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Including integrally formed optical element

C438S022000, C438S042000, C438S046000, C438S047000

Reexamination Certificate

active

06335215

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of Invention
The present invention relates to a manufacturing method of making semiconductor lasers and, more particularly, to a structure of ridge waveguide semiconductor lasers and a self-alignment method of making the same.
2. Related Art
The structure of a common ridge-waveguide laser diode is shown in FIG.
1
A. The laser diode includes a substrate
100
, such as an N-type, and a first cladding and guiding layer
102
, an active layer
104
, a second cladding and guiding layer
106
, a dielectric layer
108
, and a cap layer
110
, formed sequentially on the substrate
100
. There are also a metal layer
112
, a P-type metal electrode, located on the cap layer
110
, and another metal layer
114
, a N-type metal electrode, located underneath the substrate
100
. The waveguide structure of the laser consists of the active layer
104
, the first cladding and guiding layer
102
, and the second cladding and guiding layer
106
. Because the refraction index of the active layer
104
is larger than that of these two cladding and guiding layers
102
and
106
, the light generated by the recombination of the carriers is then confined within the active layer
104
.
Nowadays, double heterostructure (DH) is widely used in laser diodes. When the P-type electrode
112
is connected to a positive voltage and the N-type electrode is connected to a negative voltage, a consequent bias is generated. The resulting bias forces electrons from the N-type electrode, and the holes from the P-type electrode to flow toward the active layer
104
. The potential barrier generated in the active layer
104
resists the passing of those electrons and holes. As a result, the over-populated electrons and holes within the active layer
104
cause population inversion. The recombination of carriers releases light of the same energy and phase, also known as a laser, which is an acronym for light amplification by stimulated emission radiation. In the foregoing ridge-waveguide laser, current can only flow through the surface of the ridge. The dielectric layer located on the sides of the ridge structure guides the light wave efficiently to improve the electro-optic effect.
Referring to
FIG. 2
, a ridge-waveguide laser of a double-channel structure
116
is shown. The first cladding and guiding layers
102
and
106
are further divided into cladding layers
102
a
and
106
a
, and guiding layers
102
b
and
106
b
. Then, as shown in
FIG. 1B
, an etching process is performed on the laser structure to form the double channel
116
. A dielectric layer
108
is formed on the entire structure, and the dielectric layer
108
is patterned to form a contact opening that exposes the top of the cap layer
110
. Then, a P-type metal electrode
112
is formed on the top of the substrate
100
and an N-type metal electrode
114
is formed underneath the substrate
100
to accomplish the structure of a ridge-waveguide laser diode.
Even though the foregoing method for forming a ridge-waveguide laser diode is simple, misalignment occurs in the step of forming the contact opening on the ridge structure
120
, especially as the dimension of the ridge structure
120
is small. For Example, in a case having a contact opening of a 2 &mgr;m width on the ridge-structure of a 3 &mgr;m width, the alignment tolerance on either side is only 0.5 &mgr;m. This is too tiny for existent fabrication processes. Furthermore, because the ridge structure
120
is not entirely covered by the metal layer
112
, the resistance of ohmic contact is larger and the thermal radiation is worse. That is, the conventional method for fabricating a ridge-waveguide laser diode cannot provide a convenient and reliable fabrication process, and a high-performance laser diode at the same time.
There are a number of methods to resolve the foregoing problems experienced in a ridge-waveguide laser, such as U.S. Pat. No. 4,728,628, U.S. Pat. No. 4,830,986, U.S. Pat. No. 5,059,552, U.S. Pat. No. 5,208,183, U.S. Pat. No. 5,474,954, U.S. Pat. No. 5,504,768, and U.S. Pat. No. 5,658,823.
As provided by the U.S. Pat. No. 5,504,768, a method includes forming a P-type metal layer, and using the P-type metal layer as a mask to form the ridge structure and the double channel, forming a dielectric layer on the substrate, and then, forming openings. Since the P-type metal layer covers the entire ridge structure, the problems of overheating and high resistance are resolved. However, the method has an alignment problem during the process of forming a narrow ridge structure.
There is another method described in U.S. Pat. No. 5,474,954 that applies a technique of self-alignment to from a current cutoff layer on the sidewall of the P-type metal for reducing the heat generated during lasing. As the integration of the laser diode is raised, an alignment problem still occurs in the fabrication process, and degrades the process yield.
In U.S. Pat. No. 4,728,628, a method that also uses a metal layer as a mask includes forming a dielectric layer after a ridge structure is formed, forming a P-type metal layer, and then, forming openings. The width of the opening is equal to the sum of the width of the double channel and the width of the ridge structure. A smaller opening whose width is equal to the width of the ridge structure is formed within the foregoing opening, and filled with metal. The method overcomes the alignment problem, but the absence of dielectric layer on either sidewall of the ridge structure causes problems including peeling of devices and a poor reliability under a high working temperature.
Likewise, in U.S. Pat. No. 5,208,183, a method is provided to fabricate a ridge waveguide laser diode having a very narrow ridge waveguide. Even though the provided method resolves the alignment problem by eliminating critical alignment steps from the fabrication process, other problems such as overheating still exist. In addition, Since current can only flow through a limited cross section, the resistance of ohmic contact on the laser diode is extravagant.
Besides, as described in U.S. Pat. No. 5,658,823, a method is provided to protect the dielectric on either sidewall of the ridge structure. The provided method includes removing only a portion of the photoresist located on the top of the ridge structure and in the mean time, still keeping the photoresist in the double channel. Referring to
FIGS. 2 and 3
, property curves are used to explain the relationship between he remaining thickness of different photoresist and the exposure time. As shown in
FIG. 2
, the curve
200
shows the relationship between the remaining thickness of a photoresist AZ
1500
and the time exposed under the G-line mask aligner, whose wavelength is about 300 nm and up. The photoresist AZ
1500
is entirely removed by just being exposed to the G-line for 10 seconds. In other words, for every two seconds the photoresist AZ
1500
is exposed to the G-line, a thickness of a couple thousand angstroms is removed-line. So, it is obvious that the processing rate of the photolithography process that uses AZ
1500
and the G-line is too fast to control.
In
FIG. 3
, the curve
300
shows the relationship between the remaining thickness of a photoresist ODUR
1013
and the time exposed under the I-line, whose wavelength is less than 300 nm. About 100 seconds of exposure time are required to remove all the photoresist ODUR
1013
and the rate of about 1000-2000 Å per 10 seconds. Even though -linethe removal rate is slower, it is still difficult to control the photolithography process. Therefore, exposing the dielectric on the top of the ridge structure by removing the photoresist thereon is not a very practical method for the task of fabricating a ridge-waveguide semiconductor laser.
According to the foregoing, misalignment always exists in a conventional method for fabricating a ridge-waveguide semiconductor laser. A ridge-waveguide semiconductor laser made by the conventional method has undesirable properties, a large resistance, and overheating problem. Furthermore, the conv

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