Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent
1995-01-13
1998-06-30
Gorski, Joseph M.
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
356436, 359513, G01N 2149
Patent
active
057738416
ABSTRACT:
A system and a method provide a vacuum seal to be used when mounting an optical device onto a process chamber or a pump line removing exhaust gas from a process chamber. The system of the present invention includes: (a) a threaded nipple, having an internal mating surface and a threaded external surface, that is attached to the process chamber or to the pump line; (b) an internally threaded coupling, provided for accommodating the optical device, that is screwed onto the threaded external surface of the nipple, and having internally a first mating surface touching the internal mating surface of the nipple and a second mating surface; (c) a window placed on the second mating surface of the coupling; (d) means for creating a vacuum seal, e.g. an elastomer O-ring, between the first mating surface of the coupling and the mating surface of the nipple; and (e) means for creating a vacuum seal, e.g. an elastomer O-ring, between the second mating surface of the coupling and the mating surface of the window. In one embodiment, an externally threaded retaining ring located adjacent to the window is screwed into the coupling until the second mating surface of the coupling and the mating surface of the window touch.
REFERENCES:
patent: 3194364 (1965-07-01), Kolm
patent: 4547673 (1985-10-01), Larsen et al.
patent: 4643573 (1987-02-01), McLachlan et al.
patent: 4986636 (1991-01-01), Contzen et al.
patent: 5305145 (1994-04-01), Tanaka
Gorski Joseph M.
High Yield Technology, Inc.
Kwok Edward C.
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