Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1984-08-13
1986-03-18
Newsome, John H.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
430966, 430967, B05D 306
Patent
active
045768323
ABSTRACT:
A process for forming a self-aligned resist mask over a surface of an alumina ceramic substrate having a conductive molybdenum pattern at said surface by first blanket coating the surface with a negative resist sensitive to aluminum emitting X-rays. A blanket dosing of the substrate with resist insensitive X-rays occurs to induce X-ray emission by the aluminum of said substrate to penetrate said resist. The aluminum X-ray emission is screened by said molybdenum pattern at the surface and the resist adjacent the surface molybdenum pattern is penetrated by the aluminum X-ray emission. The resist is developed for removal thereof over the molybdenum pattern while retaining the resist doped by said aluminum X-ray emission. Further metalization can be accomplished by evaporation or sputtering to blanket coat the developed resist with a conductive metal followed by removal of the resist with the metal coating thereon such that the metal coating is retained on the molybdenum pattern.
REFERENCES:
patent: 3742229 (1973-06-01), Smith et al.
patent: 3742230 (1973-06-01), Spears et al.
patent: 4018938 (1977-04-01), Feder et al.
patent: 4022927 (1977-05-01), Pfeiffer et al.
patent: 4349621 (1982-09-01), Cline
patent: 4379833 (1983-04-01), Canavello et al.
"Handbook of Chemistry and Physics", pp. E-111, E-112, The Chemical Rubber Co., Cleveland, Ohio (1964).
International Business Machines - Corporation
Newsome John H.
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