Self aligning air bearing platform

Details Self aligning air bearing platform Self aligning air bearing platform

1989-04-27

1990-06-19

Watson, Robert C.

Work holders

With fluid means

269 73, 269285, 269 75, 384 12, 384 99, B23Q 102

Patent

active

049346717

ABSTRACT:
Two partial cylindrical, externally pressurized static air bearings are used to provide a self aligning air bearing platform. The self aligning air bearing platform is useful in a tape automated bonding system to bond a semiconductor device having a high pin count. A bottom bearing block has a top surface in the shape of an arc and at least one air outlet. A middle bearing block has a bottom surface configured to mate with the top surface of the bottom bearing block. The middle bearing block also has a top surface in a shape of an arc which is rotated 90.degree. with respect to the arc shaped top surface of the bottom bearing block and at least one air outlet. A top bearing block mates with the middle bearing block and provides the platform for holding the semiconductor device. Air bearings between the moving bearing blocks provide a low friction bearing for the aligning platform.

REFERENCES:
patent: 2573542 (1951-10-01), Cherry
patent: 3463563 (1969-08-01), Pfaff
patent: 4234175 (1980-11-01), Sato et al.
patent: 4320926 (1982-03-01), Heinemann et al.

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