Self aligned schottky guard ring

Details Self aligned schottky guard ring Self aligned schottky guard ring

1978-12-11

1981-04-14

Ozaki, G.

Metal working

Method of mechanical manufacture

Assembling or joining

29578, 29579, 29590, 357 15, 357 52, H01L 2128

Patent

active

042610958

ABSTRACT:
A method of forming a self aligned guard ring surrounding a schottky barrier diode device without requiring an enlargement of the final schottky barrier device. The method involves creating an overhanging opening in a insulator layer overlying a semiconductor body to expose the schottky contact area on the surface of the semiconductor body, depositing a diffusion barrier material such as molybdenum in the opening, the deposit being of the same size as the smallest part of the overhanging opening so that a guard ring can be formed from a vapor by diffusion around the deposited barrier material.

REFERENCES:
patent: 3616380 (1971-10-01), Lepselter
patent: 3742315 (1973-06-01), Iizuka et al.
patent: 3752702 (1973-08-01), Iizuka et al.
patent: 3763408 (1973-10-01), Kano et al.
patent: 4026740 (1977-05-01), Owen
patent: 4063964 (1977-12-01), Peressini et al.
Neues Aus Der Technik, Feb. 1, 1972, No. 1.
IBM Technical Disclosure Bulletin, vol. 12, No. 7, Dec. 1969, p. 1057.
IBM Technical Disclosure Bulletin, vol. 19, No. 11, Apr. 1977, pp. 4089 and 4090.

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