Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate
2008-09-09
2008-09-09
Le, Thao X. (Department: 2892)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Responsive to electromagnetic radiation
C257S042000
Reexamination Certificate
active
11445924
ABSTRACT:
A process for manufacturing phase change memory cells includes the step of forming a heater element in a semiconductor wafer and a storage region of a phase change material on and in contact with the heater element. In order to form the heater element and the phase change storage region a heater structure is first formed and a phase change layer is deposited on and in contact with the heater structure. Then, the phase change layer and the heater structure are defined by subsequent self-aligned etch steps.
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Bez Roberto
Pellizzer Fabio
Petruzza Pietro
Pirovano Agostino
Varesi Enrico
Iannucci Robert
Jorgenson Lisa K.
Le Thao X.
Seed IP Law Group PLLC
STMicroelectronics S.r.l.
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