Self-aligned nano-cross-point phase change memory

Active solid-state devices (e.g. – transistors – solid-state diode – Bulk effect device – Bulk effect switching in amorphous material

Reexamination Certificate

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Details

C257S004000, C257S005000, C257S289000, C257SE29105, C438S900000, C365S148000

Reexamination Certificate

active

08049197

ABSTRACT:
One embodiment is a phase change memory that includes a heater element transversely contacting a storage element of phase change material. In particular, an end of the storage element contacts an end of the heater element. A first pair of dielectric spacers is positioned on opposite sides of the first heater element and a second pair of dielectric spacers is positioned on opposite sides of the first storage element. The storage element, heater element, and first and second pairs of dielectric spacers can be made by a spacer patterning technique.

REFERENCES:
patent: 6462984 (2002-10-01), Xu et al.
patent: 7244956 (2007-07-01), Pellizzer
patent: 7422926 (2008-09-01), Pellizzer et al.
patent: 2007/0057341 (2007-03-01), Pellizzer

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