Self-aligned metal process for integrated circuit metallization

Details Self-aligned metal process for integrated circuit metallization Self-aligned metal process for integrated circuit metallization

1980-07-08

1983-08-30

Ozaki, G.

Metal working

Method of mechanical manufacture

Assembling or joining

29577C, 29590, 29578, 148187, 156643, 156656, H01L 2122, H01L 2128

Patent

active

044008651

ABSTRACT:
A self-aligned metal process is decribed which achieves self-aligned metal to silicon contacts and sub-micron contact-to-contact and metal-to-metal spacing. The insulation between the contacts and the metal is a pattern of dielectric material having a thickness dimension in the order of a micron or less. The metal and dielectric structure is substantially planar. The method for forming this structure involves providing a silicon body and then forming a first insulating layer on a major surface of the silicon body. A layer of polycrystalline silicon is formed thereover. Openings are made in the polycrystalline silicon layer by reactive ion etching which results in the structure having substantially horizontal surfaces and substantially vertical surfaces. A second insulating layer is then formed on both the substantially horizontal surfaces and substantially vertical surfaces. Reactive ion etching of this second insulating layer substantially removes the horizontal layers and provides a narrow dimensioned dielectric pattern of regions on the major surface of the silicon body. The remaining polycrystalline silicon layer is then removed by etching to leave the narrow dimensioned regions on the major surface of the silicon body. A conductive layer is blanket deposited over the narrow dimensioned regions and areas in between. The surface is planarized leaving the structure of metal filling the regions between the pattern of dielectric material.

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