Static information storage and retrieval – Read only systems – Fusible
Patent
1998-07-17
2000-05-09
Fears, Terrell W.
Static information storage and retrieval
Read only systems
Fusible
365127, G11C 1142, G11C 1304
Patent
active
060612649
ABSTRACT:
Provided are a self-aligned semiconductor fuse structure, a method of making such a fuse structure, and apparatuses incorporating such a fuse structure. The fuse break point, that point at which the electrical link of which the fuse is part is severed by a laser beam, is self-aligned by the use of photolithography and an anti-reflective coating. The self-alignment allows the size and location of the break point to be less sensitive to the laser beam size and alignment. This has several advantages, including allowing photolithographic control and effective size reduction of the laser spot irradiating the fuse material and surrounding structure. This permits reduced fuse pitch, increasing density and the efficiency of use of chip area, and results in reduced thermal exposure, which causes less damage to chip. In addition, laser alignment is less critical and therefore less time-consuming, which increases throughput in fabrication.
REFERENCES:
patent: 4504816 (1985-03-01), Viola et al.
patent: 5241212 (1993-08-01), Motonami et al.
patent: 5313701 (1994-05-01), Klinga et al.
patent: 5550399 (1996-08-01), Okazaki
patent: 5622892 (1997-04-01), Bezama et al.
patent: 5636172 (1997-06-01), Prall et al.
patent: 5673028 (1997-09-01), Levy
patent: 5844295 (1998-12-01), Tsukude et al.
patent: 5854510 (1998-12-01), Sur, Jr. et al.
Smith, Robert T., et al., "Laser Programmable Redundancy and Yield Improvement in a 64K DRAM," IEEE Journal of Solid-State Circuits, vol. SC-16, No. 5, pp. 506-513 (Oct. 1981).
Kantz, Dieter, et al., "A 256K DRAM with Descrambled Redundancy Test Capability," IEEE Journal of Solid-State Circuits, vol. SC-19, No. 5, pp. 596-601 (Oct. 1984).
John Wiley & Sons, Ltd, "Redundant Circuits for Enhanced Yield," Semiconductor Memories, S.Ed, p. 201 (1991).
Castagnetti Ruggero
Giust Gary K.
Liu Yauh-Ching
Ramesh Subramanian
Fears Terrell W.
LSI Logic Corporation
LandOfFree
Self-aligned fuse structure and method with anti-reflective coat does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Self-aligned fuse structure and method with anti-reflective coat, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Self-aligned fuse structure and method with anti-reflective coat will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1071451