Self-aligned electrodes contained within the trenches of an...

Details Self-aligned electrodes contained within the trenches of an... Self-aligned electrodes contained within the trenches of an...

2006-09-12

2006-09-12

Mulpuri, Savitri (Department: 2812)

Semiconductor device manufacturing: process

Packaging or treatment of packaged semiconductor

Metallic housing or support

C438S106000, C257SE23098, C257SE25013

Reexamination Certificate

active

07105382

ABSTRACT:
A device where the electrodes of an electroosmotic pump are located directly in the flow-producing region of the electroosmotic pump is described as well as methods of forming such a device. Placing the electrodes of an electroosmotic pump directly in the flow-producing region of the electroosmotic pump may increase the flow rate of a cooling fluid that is pumped through the pump. The cooling fluid may then remove a greater amount of heat from the substrate over which it is flowed. The substrate may be the non-device side of a die or a thermal management chip that is placed in direct contact with the non-device side of a die. In these instances the electroosmotic pump may be part of a microelectronic package containing the die or the thermal management chip.

REFERENCES:
patent: 5246879 (1993-09-01), Hsu et al.
patent: 5933748 (1999-08-01), Chou et al.
patent: 6007309 (1999-12-01), Hartley
patent: 6582987 (2003-06-01), Jun et al.
patent: 6861274 (2005-03-01), List et al.
patent: 6919231 (2005-07-01), Ramanathan et al.
patent: 2003/0003619 (2003-01-01), Winer et al.
patent: 2003/0129798 (2003-07-01), Saenger et al.
patent: 2003/0164231 (2003-09-01), Goodson et al.
patent: 2004/0241980 (2004-12-01), Yamazaki et al.
patent: 2005/0062150 (2005-03-01), Kim et al.
patent: 2005/0117299 (2005-06-01), Prasher et al.
Joo et al, “Fabrication of Monolithic Microchannels for IC Chip Cooling” 1995 IEEE pp. 362-367.
Laser, Daniel J., Electrokinetics and Electroosmotic Flow, The Electric Double Layer and Electrokinetic Effects, http://www.stanford.edu/˜dlaser/electrokinetics—and—eof/electrokinetics—and—eof.htm, research.htm, Jun. 2, 2003, 2 pages.
Laser, Daniel J., Silicon Electroosmotic Micropumps: Design and Theory of Operation, Prototypes, Performance, and Applications, Theory of Operation, http://www.stanford.edu/˜dlaser/silicon—eo—pumps/silicon—eo—pumps.htm, Jun. 2, 2003, 4 pages.
Laser, Daniel J., Silicon Electroosmotic Micropumps: Design and Theory of Operation, Prototypes, Performance, and Applications, Prototype Silicon Electroosmotic Micropumps, http://www.stanford.edu/˜dlaser/si—eopumps—perf/si—eopumps—perf.html, Nov. 24, 2003, 3 pages.

Affiliated with

Also associated with

Rating

Self-aligned electrodes contained within the trenches of an... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Self-aligned electrodes contained within the trenches of an..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Self-aligned electrodes contained within the trenches of an... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3615197