Self-aligned coaxial via capacitors

Details Self-aligned coaxial via capacitors Self-aligned coaxial via capacitors

2005-11-08

2005-11-08

Dinkins, Anthony (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

C361S313000, C029S025410, C257S303000, C257S306000

Reexamination Certificate

active

06963483

ABSTRACT:
The various embodiments of coaxial capacitors are self-aligned and formed in a via, including blind vias, buried vias and plated through holes. The coaxial capacitors are adapted to utilize the plating of a plated via as a first electrode. The dielectric layer is formed to overlie the first electrode while leaving a portion of the via unfilled. A second electrode is formed in the portion of the via left unfilled by the dielectric layer. Such coaxial capacitors are suited for use in decoupling and power dampening applications to reduce signal and power noise and/or reduce power overshoot and droop in electronic devices. For such applications, it is generally expected that a plurality of coaxial capacitors, often numbering in the thousands, will be coupled in parallel in order to achieve the desired level of capacitance.

REFERENCES:
patent: 3191098 (1965-06-01), Fuller
patent: 4453199 (1984-06-01), Ritchie et al.
patent: 5071521 (1991-12-01), Kojima et al.
patent: 5120572 (1992-06-01), Kumar
patent: 5219787 (1993-06-01), Carey et al.
patent: 5583739 (1996-12-01), Vu et al.
patent: 5745334 (1998-04-01), Hoffarth et al.
patent: 5765279 (1998-06-01), Moresco et al.
patent: 5872696 (1999-02-01), Peters et al.
patent: 5872697 (1999-02-01), Christensen et al.
patent: 5972053 (1999-10-01), Hoffarth et al.
patent: 5973910 (1999-10-01), Gardner
patent: 6218255 (2001-04-01), Fritzinger et al.
patent: 6323537 (2001-11-01), Fritzinger et al.
patent: 19826189 (1999-12-01), None
patent: 2161988 (1986-01-01), None
patent: 01216591 (1989-08-01), None
patent: 03252193 (1991-11-01), None
patent: 10163632 (1998-06-01), None

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