Fluid handling – With heating or cooling of the system – With electric heating element
Patent
1997-09-23
2000-08-15
Chambers, A. Michael
Fluid handling
With heating or cooling of the system
With electric heating element
137884, 137269, 251367, 25112915, F16K 1100
Patent
active
061020680
ABSTRACT:
A selector valve assembly has reduced size, reduced cost, and increased repeatability with improved reliability and reduced maintenance expense due to use of a silicon micromachined valve body held in a releasable housing which in turn is mounted on a manifold plate to which are attached inlet and outlet fluid carrying tubing. The manifold plate includes two metal plates bonded together by an intervening polymer film and defining thread female connection inlets for tube fittings. The micromachined valve body is connected to a pilot valve assembly providing pneumatic operation of the micro-valves in the micromachined valve body. Also, a heater is mounted on the manifold plate to maintain temperature. The micromachined valve body is held on the manifold plate by a releasable spring-loaded assembly allowing quickly replacement of the micro-valve body in case of its failure.
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Higdon William R.
Loux Alan D.
Chambers A. Michael
Hewlett--Packard Company
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