Electricity: measuring and testing – Conductor identification or location – Inaccessible
Patent
1978-07-06
1980-07-15
Karlsen, Ernest F.
Electricity: measuring and testing
Conductor identification or location
Inaccessible
324 64, 324158R, G01R 2700, G01R 3126
Patent
active
042130867
ABSTRACT:
A novel selector device for the determination of the conductivity-type in a semiconductor wafer utilizes the determination of the polarity of the electromotive force produced in the wafer by the Hall effect. The device comprises two pairs of probes in diagonal arrangement for supplying an electric current through the wafer and for detecting the electromotive force, respectively, by contacting the wafer surface, and a pair of permanent magnets positioned oppositely with the wafer in between to produce a magnetic field perpendicular to the wafer. One of the permanent magnets is located within the circumference determined by the probes.
REFERENCES:
Eden et al., Semiautomatic Hall Effect Measurements System, The Review of Scientific Instruments, Jul. 1970, pp. 1030-1033.
Dauphinee et al., Apparatus for Measuring Resistivity & Hall Coefficient of Semiconductors, The Review of Scientific Instruments, Jul. 1953, pp. 660-662.
Zhilinskas et al., Measurement of the Hall Effect in High-Ohm Samples, Instrum. & Exp. Tech. (USA), May-Jun. 1972, pp. 901-904.
Iida Yoshiya
Ohga Shoichiro
Karlsen Ernest F.
Shin-Etsu Handotal Co., Ltd.
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