Selective semiconductor coating and protective mask therefor

Details Selective semiconductor coating and protective mask therefor Selective semiconductor coating and protective mask therefor

1983-12-20

1986-09-16

Walsh, Donald P.

Coating processes

Electrical product produced

Condenser or capacitor

430317, 430327, 430524, 430531, B05D 512

Patent

active

046122117

ABSTRACT:
An improved method of selectively depositing coatings onto bodies of semiconductor material employs as a protective mask an alkyl ester of a sulfosuccinate salt. The mask material is applied to areas which are to be kept free of the coatings. The overspray of a desired coating, onto the protective mask is deposited in a cracked, non-continuous manner, as opposed to the smooth crystalline layer being deposited over the semiconductor body. This overspray coating can be readily removed.

REFERENCES:
patent: 2445253 (1948-07-01), Verhoek et al.
patent: 3701047 (1972-10-01), Caplan et al.
patent: 4022928 (1977-05-01), Piwcyzk
patent: 4092659 (1978-05-01), Ettenberg
patent: 4178564 (1979-12-01), Ladany et al.
patent: 4200463 (1980-04-01), Flowers
patent: 4201592 (1980-05-01), Doi et al.

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