Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate
2006-10-03
2006-10-03
Fuqua, Shawntina (Department: 3742)
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
C219S390000, C219S411000, C219S443100, C219S543000, C118S724000, C118S725000, C118S050100, C118S728000, C392S416000, C392S418000
Reexamination Certificate
active
07115837
ABSTRACT:
A customizable chamber spectral response is described which can be used at least to tailor chamber performance for wafer heating, wafer cooling, temperature measurement, and stray light. In one aspect, a system is described for processing a treatment object having a given emission spectrum at a treatment object temperature which causes the treatment object to produce a treatment object radiated energy. The chamber responds in a first way to the heating arrangement radiated energy and in a second way to the treatment object radiated energy that is incident thereon. The chamber may respond in the first way by reflecting the majority of the heat source radiated energy and in the second way by absorbing the majority of the treatment object radiated energy. Different portions of the chamber may be treated with selectively reflectivity based on design considerations to achieve objectives with respect to a particular chamber performance parameter.
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Bordiga Peter C.
Devine Daniel J.
Hu Yao Zhi
Lee Young Jai
Timans Paul J.
Fuqua Shawntina
Mattson Technology Inc.
Pritzkau Patent Group LLC
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