Selective etchants for thin film devices

Adhesive bonding and miscellaneous chemical manufacture – Methods

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156 7, 156 11, 156 17, 156 18, 357 2, H01L 2112

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active

039560422

ABSTRACT:
A method of making thin film devices with selective etchants. Specifically, a fabrication process in accordance with the invention provides for the manufacture of amorphous chalcogenide sandwich structures. Such structures consist of a glass substrate, a chromium or aluminum electrode on the substrate bounding one side of the chalcogenide layer, and a second electrode of aluminum bounding the other side of the chalcogenide layer. First, the aluminum electrode is etched without affecting the other layers. Secondly, the chalcogenide layer is etched with a solution which attacks only the chalcogenide material and neither the overlying aluminum nor the underlying chromium or aluminum electrode. This two-step process is particularly suitable for fabricating current controlled negative differential resistance devices which requires the precise registration of one of the electrodes with the boundary of the chalcogenide such that a coextensive boundary is achieved.

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"Selective Etching of Gallium Arsenide Crystals in H.sub.2 SO.sub.4 --H.sub.2 O.sub.2 --H.sub.2 O System", S. Iida and K. Ito, Journal of Electrical Society, Vol. 118-No. 5 (1971), p. 768.

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