Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate
2010-06-03
2011-12-06
Sandvik, Benjamin (Department: 2826)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Responsive to electromagnetic radiation
C438S530000, C257SE21147
Reexamination Certificate
active
08071418
ABSTRACT:
Solar cells and methods for their manufacture are disclosed. An example method may include providing a silicon substrate and introducing dopant to one or more selective regions of the front surface of the substrate by ion implantation. The substrate may be subjected to a single high-temperature anneal cycle. Additional dopant atoms may be introduced for diffusion into the front surface of the substrate during the single anneal cycle. A selective emitter may be formed on the front surface of the substrate such that the one or more selective regions of the selective emitter layer are more heavily doped than the remainder of the selective emitter layer. Associated solar cells are also provided.
REFERENCES:
patent: 6091021 (2000-07-01), Ruby et al.
patent: 2004/0112426 (2004-06-01), Hagino
patent: 2009/0142875 (2009-06-01), Borden et al.
patent: 2009/0227061 (2009-09-01), Bateman et al.
patent: 2009/0227062 (2009-09-01), Sullivan et al.
patent: 2009/0227094 (2009-09-01), Bateman et al.
patent: 2009/0227095 (2009-09-01), Bateman et al.
patent: 2009/0227097 (2009-09-01), Bateman et al.
patent: 2009/0308439 (2009-12-01), Adibi et al.
patent: 2009/0308440 (2009-12-01), Adibi et al.
patent: 2009/0308450 (2009-12-01), Adibi et al.
patent: 2009/0309039 (2009-12-01), Adibi et al.
patent: 2009/0317937 (2009-12-01), Gupta et al.
patent: 2010/0015750 (2010-01-01), Shen et al.
patent: 2010/0041176 (2010-02-01), Sullivan et al.
patent: 2010/0059362 (2010-03-01), Anella
patent: 2010/0124799 (2010-05-01), Blake et al.
patent: 2010/0197125 (2010-08-01), Low et al.
patent: 2010/0197126 (2010-08-01), Bateman et al.
patent: 2010/0224240 (2010-09-01), Bateman et al.
patent: 2010/0297782 (2010-11-01), Riordon et al.
patent: 2010/0308236 (2010-12-01), Carlson et al.
patent: 2010/0314559 (2010-12-01), Vopat et al.
patent: 2011/0039367 (2011-02-01), Bateman et al.
patent: 2011/0089342 (2011-04-01), Daniels et al.
patent: 2011/0089343 (2011-04-01), Daniels et al.
patent: 2011/0092059 (2011-04-01), Daniels et al.
patent: 2011/0097840 (2011-04-01), Ramappa
patent: 2011/0104618 (2011-05-01), Bateman et al.
patent: 2011/0177652 (2011-07-01), Gupta et al.
patent: 2011/0180131 (2011-07-01), Mullin et al.
Kreinin et al., Combined Thermal Diffusion—Ion Implantation Fabrication Processing for Silicon Solar Cells, 2000, pp. 317-322, No. 4, Opto-Electroncs Review.
Meemongkolkiat et al., Investigation of RTP and Belt Fired Screen Printed Al-BSF on Textured and Planar Back Surfaces of Silicon Solar Cells, May 11-18, 2003, 4 pages total, 3rd World Conference on Photovoltaic Energy Conversion, Georgia Institute of Technology.
Ebong et al., Development of Front Silver Paste for Producing Fine Lines and High Quality Contacts to 100Ω/SQ Emitters With Low Surface Phosphorus Concentration, Sep. 1-5, 2008, pp. 1713-1716, 23rdEuropean Photovoltaic Solar Energy Conference, Valencia.
Kerr et al., Surface Recombination Velocity of Phosphorus-Diffused Silicon Solar Cell Emitters Passivated With Plasma Enhanced Chemical Vapor Deposited Silicon Nitride and Thermal Silicon Oxide, Apr. 1, 2001, vol. 89, No. 7, pp. 3821-3826, Journal of Applied Physics.
Antoniadis, Silicon Ink High Efficiency Solar Cells, 2009, pp. 650-654, 34thIEEE Photovoltaic Specialists Conference (PVSC).
Monna et al., 17.8% Efficiency Obtained on C-Si Solar Cells Using a Selective Emitter Industrial Type Process, 2008, 4 pages total, 23rdEU-PVSEC Valencia.
Book et al., Two Diffusion Step Selective Emitter: Comparison of Mask Opening By Laser or Etching Paste, 2008, 4 pages total, 23rdEU-PVSEC Valencia.
Dastgheib-Shirazi et al., Selective Emitter for Industrial Solar Cell Production: A Wet Chemical Approach Using a Single Side Diffusion Process, 2008, 3 pages total, 23rdEU-PVSEC Valencia.
Röder et al., 0.4% Absolute Efficiency Gain of Industrial Solar cells By Laser Doped Selective Emitter, 2009, pp. 871-873, 34thIEEE Photovoltaic Specialists Conference (PVSC).
Jeon et al., Emitter Formation Using Ion Implatation Method for Fabrication of Crystalline Silicon Solar Cells, Sep. 2010, pp. 2438-2441, 25thEU-PVSEC, Valencia.
Westbrook, Glow-Discharge-Implanted, Thermally Annealed, Oxide-Passivated Silicon Solar Cells of 19% Efficiency, Feb. 23, 1987, pp. 469-471, Applied Physics Letters.
Douglas et al., A Study of the Factors Which Control the Efficiency of Ion-Implanted Silicon Solar Cells, Apr. 1980, pp. 792-802, vol. 27, Issue 4, IEEE Transactions on Electron Devices.
Minnucci et al., Tailored Emitter, Low-Resistivity, Ion-Implanted Silicon Solar Cells, Apr. 1980, pp. 802-806, vol. 27, Issue 4, IEEE Transactions on Electron Devices.
Spitzer et al., High-Efficiency Ion-Implanted Silicon Solar Cells, May 1984, vol. 31, Issue 5, pp. 546-550, IEEE Transactions on Electron Devices.
Keavney et al., Solar Cell Junction Profiles in Ion-Implanted Texture-Etched Surfaces, Jul. 15, 1984, pp. 592-593, Journal of Applied Physics.
Bordin et al., Recombination Parameters of Si Solar Cells With Back Surface Field Formed by Ion Implantation, 2006, pp. 1171-1174, 4thWorld Conference on Photovoltaic Energy Conversion.
Gupta et al., High Efficiency Selective Emitter Cells Using In-Situ Patterned Ion-Implantation, Sep. 2010, pp. 1158-1162, 25thEU-PVSEC, Valencia.
Chandrasekaran Vinodh
Damiani Ben
Davis Preston
Rohatgi Ajeet
Yelundur Vijay
Alston & Bird LLP
Kuo Wensing
Sandvik Benjamin
Suniva, Inc.
LandOfFree
Selective emitter solar cells formed by a hybrid diffusion... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Selective emitter solar cells formed by a hybrid diffusion..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Selective emitter solar cells formed by a hybrid diffusion... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4304025