Selective deposition to improve selectivity and structures...

Details Selective deposition to improve selectivity and structures... Selective deposition to improve selectivity and structures...

2008-04-15

2008-04-15

Nguyen, Cuong (Department: 2811)

Active solid-state devices (e.g., transistors, solid-state diode

Gate arrays

C257S368000, C257S506000

Reexamination Certificate

active

07358547

ABSTRACT:
Methods and associated apparatus of forming a microelectronic structure are described. Those methods comprise providing a substrate comprising a region of higher active area density comprising source and drain recesses and a region of lower active area density comprising source and drain recesses, wherein the region of lower active area density further comprises dummy recesses, and selectively depositing a silicon alloy layer in the source, drain and dummy recesses to enhance the selectivity and uniformity of the silicon alloy deposition.

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