Selective and non-selective deposition of Si.sub.1-x Ge.sub.x on

Details Selective and non-selective deposition of Si.sub.1-x Ge.sub.x on Selective and non-selective deposition of Si.sub.1-x Ge.sub.x on

1989-12-01

1993-04-13

Wilczewski, Mary

Fishing, trapping, and vermin destroying

148DIG26, 437 99, 437106, H01L 2120, H01L 21205

Patent

active

052022846

ABSTRACT:
Several methods are disclosed for minimizing the number of defects or misfit locations in a SiGe layer selectively or non-selectively deposited on a partially oxide masked Si substrate.

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