Image analysis – Image transformation or preprocessing – Combining image portions
Patent
1997-12-17
1999-11-23
Couso, Jose L.
Image analysis
Image transformation or preprocessing
Combining image portions
382108, 382154, 382286, 356376, 356345, 356356, 356359, 345419, 345425, 348 47, 348 48, 348 94, G06K 936
Patent
active
059914610
ABSTRACT:
The process of combining various sets of measured data is carried out by first selecting a section of the test surface and its data set as the starting point and comparing the regions of overlap with adjacent sections of the test sample. All pixels containing an invalid data point in at least one of the data sets of each overlapping region are eliminated from consideration and the remaining valid pixels are counted. Then the adjacent section having an overlapping region with the largest number of valid pixels is selected for combination with the first section and their data sets are fitted according to a predetermined procedure, thereby producing an enlarged composite set of corrected data. The process is then repeated by comparing the overlapping regions of all sets adjacent to the composite section to determine the one having the largest number of pixels with valid data points. That set is then fitted to the existing composite profile to produce a new composite set of corrected data. These steps are repeated until the measured data corresponding to all sections are corrected and combined to produce a single uniform map of the sample surface.
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Schmit Joanna
Schmucker Mark A.
Couso Jose L.
Durando Antonio R.
Patel Kanji
Veeco Corporation
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