Organic compounds -- part of the class 532-570 series – Organic compounds – Oxygen containing
Patent
1993-04-05
1994-02-01
Lone, Werren B.
Organic compounds -- part of the class 532-570 series
Organic compounds
Oxygen containing
568718, 568720, C07C 3917
Patent
active
052833747
ABSTRACT:
A radiation-sensitive composition comprising an admixture in a solvent of: at least one alkali-soluble binder resin, at least one photoactive compound and an effective sensitivity enhancing amount of at least one compound of formula (I): ##STR1## wherein each R is individually selected from the group consisting of hydrogen and a lower alkyl group having 1-4 carbon atoms and each n is 0, 1, or 2; the amount of said binder resin being about 60 to 95% by weight, the amount of said photoactive component being about 5% to about 40% by weight, based on the total solids content of said radiation-sensitive composition.
REFERENCES:
patent: 5010163 (1991-04-01), Serini et al.
patent: 5112719 (1992-05-01), Yamada et al.
Lone Werren B.
OCG Microelectronic Materials Inc.
Simons William A.
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