Selected novolak resin planarization layer for lithographic appl

Details Selected novolak resin planarization layer for lithographic appl Selected novolak resin planarization layer for lithographic appl

1993-02-08

1994-01-04

Kight, III, John

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

From phenol, phenol ether, or inorganic phenolate

528129, 528166, 430166, 430311, 430312, 430313, 430314, 430315, 428 357, 428460, 428620, 428623, 428626, 427 96, 427 97, 427240, 4273855, C08G 824, G03C 152, B05D 512, B29D 2200

Patent

active

052761266

ABSTRACT:
A method of planarizing topographical features on a substrate for subsequent coating of a radiation sensitive composition thereon comprising:

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