Selectable-resolution charged-particle beam analyzers

Details Selectable-resolution charged-particle beam analyzers Selectable-resolution charged-particle beam analyzers

1990-12-18

1992-02-25

Berman, Jack I.

Radiant energy

Electron energy analysis

250294, 250295, H01J 4926

Patent

active

050916459

ABSTRACT:
A method of selecting the resolution of a charged-particle energy or momentum analyzer wherein an analyzing field disperses the particles in an analyzing plane. An electrostatic field generator is adjusted to cause the dispersed particles leaving the field to pass through either of two apertures formed in a resolving aperture member and disposed at different distances from the plane. Each aperture has a different width, selected to result in a different resolution of the analyzing field. A single means for receiving charged particles (typically an ion or electron detector) is disposed to receive particles which have passed through either aperture. A magnetic sector mass spectrometer incorporating the method is also disclosed.

REFERENCES:
patent: 3546450 (1970-12-01), Burns
patent: 3655963 (1972-04-01), Brunnee et al.
patent: 4213051 (1980-07-01), Struthoff
patent: 4595831 (1986-06-01), Hetherington, Jr. et al.
patent: 4612440 (1986-09-01), Brunnee et al.

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