Seismic isolation system with reaction mass

Details Seismic isolation system with reaction mass Seismic isolation system with reaction mass

1986-05-30

1989-04-11

Lall, Parshotam S.

Boots, shoes, and leggings

248550, 248638, F16M 1300

Patent

active

048212059

ABSTRACT:
An active inertial isolation system is disclosed generally for any inertial body, and also for bodies subject to structural resonance, and further particularly for a microlithography system (2) for processing semiconductor wafers (4) subject to a submicron design rule. One or more linear forcers (94, 76, 74, 94' 76', FIGS. 18 and 19) are provided for applying a force between the body or worktable (6) and a reaction mass RM (202, 204, 206, 210). One or more accelerometers (98, 78) sense acceleration of the body (6) and apply force against sensed acceleration regardless of the position or variation of position of the body (6) relative to the reaction mass RM. The reaction mass RM may be supported relative to the linear forcer, and/or be a part thereof or rigidly fixed thereto, or the reaction mass RM may be supported relative to a reference such as a sidewall or the floor.

REFERENCES:
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patent: 4328941 (1982-05-01), Phillips et al.
patent: 4336917 (1982-06-01), Phillips
patent: 4483425 (1981-11-01), Newman
patent: 4546960 (1985-10-01), Abrams et al.
patent: 4615504 (1986-10-01), Sandercock
Morison et al., "Comparison of Optimized active and passive vibration absorbers," 1973, pp. 932-938, Automatic Control Conf. of the Amer. Automatic Control Council.

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