Segmented pallet for disk-shaped substrate electrical...

Metal working – Method of mechanical manufacture – Electrical device making

Reexamination Certificate

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Details

C029S846000, C029S759000, C029S760000, C029S742000, C029S745000, C361S760000, C198S465100

Reexamination Certificate

active

06886244

ABSTRACT:
An apparatus for performing treatments to the surface of disk-shaped workpieces/substrates, as in the manufacture of multi-layer, thin-film recording media. The apparatus includes treatment stations for performing treatments to a surface of each of the disk-shaped workpieces/substrates; a pallet adapted for mounting the disk-shaped workpieces/substrates, a plurality of bias potential sources; and a transporting source to transport the pallet past the treatment stations. The pallet includes electrically conductive segments and each segment is electrically insulated from other segments; is adapted to mount and expose at lest one surface of a disk-shaped workpiece; and includes an electrical contact for providing electrical contact with the bias potential source of the apparatus.

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