Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2007-04-17
2007-04-17
Thompson, Timothy (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S290000
Reexamination Certificate
active
11009447
ABSTRACT:
An apparatus having a plurality of arrayed MEMS devices, each device having a parallel-plate actuator and a reflective plate, both of which are mechanically coupled to a flexible beam attached between two anchors. Advantageously, the use of parallel-plate actuators in the apparatus alleviates stringent requirements for the alignment of lithographic masks employed in the fabrication process. In one embodiment, each flexible beam has a relatively small thickness and a relatively large length to effect a relatively large displacement range for the corresponding reflective plate. Movable electrodes of different parallel-plate actuators are configured to act as an electrical shield for the flexible beams, which reduces inter-device crosstalk in the apparatus. Reflective plates of different MEMS devices form a segmented mirror, which is suitable for adaptive-optics and/or maskless lithography applications.
REFERENCES:
patent: 5691541 (1997-11-01), Ceglio et al.
patent: 6201631 (2001-03-01), Greywall
patent: 6384952 (2002-05-01), Clark et al.
patent: 2002/0067533 (2002-06-01), Sun et al.
Aksyuk Vladimir A.
Bolle Cristian A.
Simon Maria E.
Fang Jerry
Lucent Technologies - Inc.
Thompson Timothy
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