Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Patent
1992-03-16
1993-03-09
Harvey, Jack B.
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
324158R, 324501, 210310, G01R 3100
Patent
active
051929139
ABSTRACT:
A method of electrically testing an electrical component containing a plurality of networks with at least one node. The method uses segmented, charge limiting testing to charge the nodes and detect shorted or disconnected nodes while preventing accumulated charges in the networks from making uncharged nodes appear charged. The method is well suited for voltage contrast electron beam testing of unpopulated high density multichip modules and interconnect substrates.
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Schmidt et al., "Design and Application of an E-beam Test System for Microwiring Substrates," 34th Electron, Ion and Photon Beams Conference, Munich Germany, May 29-Jun. 1, 1990.
Goruganthu Rama R.
Myers Thomas K.
Ross Andrew W.
Harvey Jack B.
Microelectronics and Computer Technology Corporation
Regan Maura K.
Sigmond David M.
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