Seed crystals, seed crystal holders, and a method for pulling a

Details Seed crystals, seed crystal holders, and a method for pulling a Seed crystals, seed crystal holders, and a method for pulling a

1999-10-29

2000-10-31

Hiteshew, Felisa

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

4233281, 117911, C30B 3500

Patent

active

06139632&

ABSTRACT:
When a pulled single crystal becomes heavier, the strength of a seed crystal holder made of a carbon material is not sufficient, leading to falling of the single crystal. On the other hand, a seed crystal holder made of metal causes heavy metal contamination, or the strength thereof deteriorates early because of thermal fatigue. Accordingly, a seed crystal holder, comprising an inner cylindrical body made of metal which directly holds a seed crystal, and a carbon cylindrical body arranged around the inner cylindrical body which covers the periphery thereof, is used.

REFERENCES:
patent: 4594127 (1986-06-01), Lane et al.
patent: 5833750 (1998-11-01), Mizuishi et al.
patent: 6015461 (2000-01-01), Izumi

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