Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – For crystallization from liquid or supercritical state
Patent
1997-02-20
1998-12-22
Garrett, Felisa
Single-crystal, oriented-crystal, and epitaxy growth processes;
Apparatus
For crystallization from liquid or supercritical state
117200, 117218, 117900, C30B 3500
Patent
active
058512870
ABSTRACT:
A seed crystal holder is used to grow a single crystal in an intended direction. In order to grow a single crystal in an intended direction by a crystal pulling method, a seed crystal is accurately cut out along a crystal orientation, and this seed crystal is accurately held in a predetermined attitude by the seed crystal holder. A seed crystal insertion bore having a rectangular cross-section is formed in the body of the seed crystal holder. A seed crystal having a taper surface at one edge is inserted into the seed crystal insertion bore. The inserted seed crystal is pressed at its taper surface by a taper surface of a block, so that two surfaces of the seed crystal are fixedly pressed against two inner surfaces of the seed crystal insertion bore. The other end of the block is covered with a block-retaining ring, so that the block does not come off the seed crystal holder.
REFERENCES:
patent: 3046029 (1962-07-01), Weber et al.
patent: 3159408 (1964-12-01), Sanchez et al.
patent: 3592937 (1971-07-01), Emeis
patent: 4186173 (1980-01-01), Jericho et al.
patent: 4594127 (1986-06-01), Lane et al.
Garrett Felisa
Shin-Etsu Handotai & Co., Ltd.
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