Seed crystal holder

Details Seed crystal holder Seed crystal holder

1998-08-25

1999-09-07

Hiteshew, Felisa

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

For crystallization from liquid or supercritical state

117200, 117900, 117911, C30B 3500

Patent

active

059481641

ABSTRACT:
A seed crystal holder used in a crystal pulling apparatus operated in accordance with the Czochralski method. In the seed crystal holder, a heat-resistant cushioning material is provided between the surface of a seed crystal and the contact surface of claws of the holder or between a cutaway surface of the seed crystal and a contact surface of an insert of the holder. The heat-resistant cushioning material is selected from the group consisting of carbon fiber felt, glass fiber felt, metallic fiber felt, or selected from materials that cause plastic deformation such as Al.

REFERENCES:
patent: 3923468 (1975-12-01), Keller
patent: 4350560 (1982-09-01), Hehgehand et al.
patent: 4594127 (1986-06-01), Hehgehand et al.
patent: 5234664 (1993-08-01), Drechsel

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