Secondary process controller for supplementing a primary...

Details Secondary process controller for supplementing a primary... Secondary process controller for supplementing a primary...

2007-08-07

2007-08-07

Hartman, Jr., Ronald D (Department: 2121)

Data processing: generic control systems or specific application

Generic control system, apparatus or process

Optimization or adaptive control

C700S095000, C700S121000

Reexamination Certificate

active

10301051

ABSTRACT:
A method and an apparatus for implementing a multi-variate process control system. A workpiece is processed using a primary process control function during a first time period. A secondary process control function is performed during at least a portion of the first time period for processing of the workpiece. The secondary process control function is capable of modifying at least one secondary control parameter.

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Google definition for METROLOGY.
International Search Report dated May 19, 2004 for International application No. PCT/US03/35326 Filed Nov. 11, 2003.

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