Secondary electron spectrometer for measuring voltages on a samp

Details Secondary electron spectrometer for measuring voltages on a samp Secondary electron spectrometer for measuring voltages on a samp

1982-07-15

1985-04-30

Levy, Stewart J.

Electricity: measuring and testing

Determining nonelectric properties by measuring electric...

Beam of atomic particles

250310, 324409, G01N 2700

Patent

active

045146829

ABSTRACT:
An improved secondary electron spectrometer for measuring voltages occurring on a specimen, such as an integrated circuit chip, utilizing an electron probe has a grating structure for measuring the energy distribution of the secondary electrons independently of the angular distribution of the secondary electrons at the measuring point on the specimen. If the secondary electron spectrometer has an extraction electrode and a deceleration electrode, the grating structure is spherically symmetric.

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H.-P. Feuerbaum, "VLSI Testing Using the Electron Probe", Scanning Electron Microscopy 1979 pp. 285-296.

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