Secondary electron measuring circuit

Details Secondary electron measuring circuit Secondary electron measuring circuit

1987-11-03

1989-05-09

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

250311, 324 73R, G01R 3128, G01N 23225

Patent

active

048292400

ABSTRACT:
A secondary electron measuring circuit includes a secondary electron detector for detecting secondary electron pulses sequentially emitted from the measurement point in a semiconductor circuit chip, a peak holding circuit for holding the peak level of each output pulse from the secondary electron detector and an analog/digital converter for converting an output signal of the peak hold circuit into a digital signal. It further includes a correction coefficient generator for generating as output data a correction coefficient indicating the degree of the local field effect which is determined based on the potential distribution in an area including the measurement point and a digital multiplier for deriving the product of output data of the analog/digital converter and output data of the correction coefficient generator.

REFERENCES:
patent: 4413181 (1983-11-01), Feuerbaum
patent: 4675602 (1987-06-01), Feuerbaum et al.
patent: 4692690 (1987-09-01), Hara et al.
patent: 4704576 (1987-11-01), Tributsch et al.

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