Radiant energy – With charged particle beam deflection or focussing – With detector
Reexamination Certificate
2005-10-13
2008-09-16
Berman, Jack I. (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
With detector
C250S3960ML, C250S399000
Reexamination Certificate
active
07425708
ABSTRACT:
The secondary electron detector unit for a scanning electron microscope is mounted in a head body (1). In the lower part of the head body (1), a lower throttling aperture (2) is placed. Above the lower throttling aperture (2), the microporous plate (3) is sealed in the head body (1) by a gasket (5) and fastened with the use of the frame plate (6) which has an opening that exposes the active input area (7) placed asymmetrically with respect to the axis of the scanning electron beam (WE). Above the microporous plate (3), the scintillator (11) and the light pipe (12) are fixed at the side of the head body (1).
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patent: 5387793 (1995-02-01), Sato et al.
patent: 5408098 (1995-04-01), Wells
patent: 5990483 (1999-11-01), Shariv et al.
patent: 6265812 (2001-07-01), Watanabe et al.
patent: 6646262 (2003-11-01), Todokoro et al.
patent: 62184752 (1987-08-01), None
patent: 329339 (2000-04-01), None
Slowko, W., “Electron signal acquisition in HPSEM” Vacuum, 2003, 70, Elsevier Science Ltd., pp. 157 to 162.
PCT International Preliminary Report on Patentability, dated Oct. 21, 2005.
Berman Jack I.
Ottesen Walter
Politechnika Wrolawska
Smyth Andrew
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