Secondary alignment target for an electro-optical alignment meas

Optics: measuring and testing – Angle measuring or angular axial alignment – With photodetection remote from measured angle

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356400, G01B 1126

Patent

active

043469949

ABSTRACT:
The secondary optical alignment target (100) of the present invention includes a housing (102) through which an optical beam (122) is directed. A beam splitter (104) mounted in the housing (102) passes one portion (128) of the beam out of the target (100) to maintain the reference line of sight initially established by the axis of the optical beam (122). The other portion (126) of the beam is reflected toward an optical window (110) which further splits the reflected portion (126) into reflected (130) and refracted sub-portions. The refracted sub-portion of the beam furnishes optical information regarding the translational orientation of the target (100), while the reflected sub-portion (130) of the beam is rereflected by beam splitter (104) to furnish a return beam (134) containing optical information regarding the rotational orientation of the target (100). A photodetector (112) mounted in the housing (100) detects the refracted subportion and photodetector (28') mounted at the optical beam source (2' ) detects the return beam (134). A method for using a plurality of targets (100) to simultaneously align a plurality of target stations is described.

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