Second gallium nitride layers that extend into trenches in...

Active solid-state devices (e.g. – transistors – solid-state diode – Specified wide band gap semiconductor material other than... – Diamond or silicon carbide

Reexamination Certificate

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C257S086000

Reexamination Certificate

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06897483

ABSTRACT:
A gallium nitride layer is laterally grown into a trench in the gallium nitride layer, to thereby form a lateral gallium nitride semiconductor layer. At least one microelectronic device may then be formed in the lateral gallium nitride semiconductor layer. Dislocation defects do not significantly propagate laterally into the lateral gallium nitride semiconductor layer, so that the lateral gallium nitride semiconductor layer is relatively defect free.

REFERENCES:
patent: 4127792 (1978-11-01), Nakata
patent: 4522661 (1985-06-01), Morrison et al.
patent: 4651407 (1987-03-01), Bencuya
patent: 4865685 (1989-09-01), Palmour
patent: 4876210 (1989-10-01), Barnett et al.
patent: 4912064 (1990-03-01), Kong et al.
patent: 4946547 (1990-08-01), Palmour et al.
patent: 5122845 (1992-06-01), Manabe et al.
patent: 5156995 (1992-10-01), Fitzgerald, Jr. et al.
patent: RE34861 (1995-02-01), Davis et al.
patent: 5389571 (1995-02-01), Takeuchi et al.
patent: 5397736 (1995-03-01), Bauser et al.
patent: 5549747 (1996-08-01), Bozler et al.
patent: 5583880 (1996-12-01), Shakuda
patent: 5602418 (1997-02-01), Imai et al.
patent: 5710057 (1998-01-01), Kenney
patent: 5760426 (1998-06-01), Marx et al.
patent: 5786606 (1998-07-01), Nishio et al.
patent: 5815520 (1998-09-01), Furushima
patent: 5877070 (1999-03-01), Goesele et al.
patent: 5880485 (1999-03-01), Marx et al.
patent: 5912477 (1999-06-01), Negley
patent: 5915194 (1999-06-01), Powell et al.
patent: 6051849 (2000-04-01), Davis
patent: 6064078 (2000-05-01), Northrup et al.
patent: 6072819 (2000-06-01), Shakuda
patent: 6100104 (2000-08-01), Haerle
patent: 6100111 (2000-08-01), Konstantinov
patent: 6121121 (2000-09-01), Koide
patent: 6153010 (2000-11-01), Kiyoku et al.
patent: 6156584 (2000-12-01), Itoh et al.
patent: 6177688 (2001-01-01), Linthicum et al.
patent: 6261929 (2001-07-01), Gehrke et al.
patent: 6325850 (2001-12-01), Beaumont et al.
patent: 6380108 (2002-04-01), Linthicum et al.
patent: 6403451 (2002-06-01), Linthicum et al.
patent: 6255198 (2002-07-01), Linthicum et al.
patent: 6521514 (2003-02-01), Gehrke et al.
patent: 20020069816 (2002-06-01), Gehrke et al.
patent: 2258080 (1998-10-01), None
patent: 0 551 721 (1993-07-01), None
patent: 0 852 416 (1998-07-01), None
patent: 0 884 767 (1998-12-01), None
patent: 0 942 459 (1999-09-01), None
patent: 0 951 055 (1999-10-01), None
patent: 3-132016 (1991-06-01), None
patent: 4-188678 (1992-07-01), None
patent: 5-7016 (1993-01-01), None
patent: 5-41536 (1993-02-01), None
patent: 8-18159 (1996-01-01), None
patent: 08-064791 (1996-03-01), None
patent: 8-116093 (1996-05-01), None
patent: 8-125251 (1996-05-01), None
patent: 8-153931 (1996-06-01), None
patent: 9-93315 (1997-04-01), None
patent: 9-174494 (1997-06-01), None
patent: 9-181071 (1997-07-01), None
patent: 9-201477 (1997-07-01), None
patent: 9-277448 (1997-10-01), None
patent: 9-290098 (1997-10-01), None
patent: 9-324997 (1997-11-01), None
patent: 11-145516 (1999-05-01), None
patent: WO 9711518 (1997-03-01), None
patent: WO 9847170 (1998-10-01), None
patent: WO 9918617 (1999-04-01), None
patent: WO 9944224 (1999-09-01), None
Akasaki et al.,Effects of AIN Buffer Layer on Crystallographic Structure and on Electrical and Optical Properties of GaN and Ga1-×A1×N(0<×≲0.4)Films Grown on Sapphire Substrate by MOVPE, Journal of Crystal Growth, vol. 98, 1989, pp. 209-219.
Allegretti et al.,In-situ Observation of GaAs Selective Epitaxy on GaAs(111)B Substrates, Journal of Crystal Growth, vol. 146, 1995, pp. 354-358.
Allegretti et al.,Periodic Supply Epitaxy: A New Approach for the Selective Area Growth of GaAs by Molecular Beam Epitaxy, Journal of Crystal Growth, vol. 156, 1995, pp. 1-10.
Amano et al.,Metalorganic Vapor Phase Epitaxial Growth of a High Quality GaN Film Using an AlN Buffer Layer, Applied Physics Letters, vol. 48, No. 5, Feb. 3, 1986, pp. 353-355.
Boo et al.,Growth of Hexagonal GaN Thin Films on Si(111)with Cubic SiC Buffer Layers, Journal of Crystal Growth 189-190, 1998, pp. 183-188.
Chen et al.,Dislocation Reduction in GaN Thin Films Via Lateral Overgrowth From Trenches, Applied Physics Letters, vol. 75, No. 14, Oct. 4, 1999, pp. 2062-2063.
Chen et al.,Silicon-on-Insulator: Why, How, and When, AIP Conference Proceedings, vol. 167, No. 1, Sep. 15, 1988, pp. 310-319.
Doverspike et al.,The Effect of GaN and AIN Buffer Layers on GaN Film Properties Grown on Both C-Plane and A-Plane Sapphire, Journal of Electronic Materials, vol. 24, No. 4, 1995, pp. 269-273.
Gallium Nitride-2000-Technology, Status, Applications, and Market Forecasts, Strategies Unlimited, Report SC-23, May 2000.
Gehrke et al.,Pendeo-Epitaxial Growth of Gallium Nitride on Silicon Substrates, Journal of Electronic Materials, vol. 29, No. 3, Mar. 2000, pp. 306-310.
Gehrke et al.,Pendeo-Epitaxy of Gallium Nitride and Aluminum Nitride Films and Heterostructures on Silicon Carbide Substrate, MRS Internet J. Semicond. Res. 4S1, G3.2, 1999, 6 pp.
Givargizov,Other Approaches to Oriented Crystallization on Amorphous Substrates, Chapter 4, Oriented Crystallization on Amorphous Substrates, Plenum Press, 1991, pp. 221-264.
Gustafsson et al.,Investigations of High Quality Ge×Si1-×Grown by heteroepitaxial Lateral Overgrowth Using Cathoduluminescence, Inst. Phys. Conf. Ser. No. 134: Section 11, Micros. Semicond. Mater. Conf., Oxford, Apr. 5-8, 1993, pp. 675-678.
Hiramatsu et al.,Growth Mechanism of GaN Grown on Sapphire With AlN Buffer Layer by MOVPE, Journal of Crystal Growth, vol. 115, 1991, pp. 628-633.
Hiramatsu et al.,Selective Area Growth and Epitaxial Lateral Overgrowth of GaN, Properties, Processing and Applications of Gallium Nitride and Related Semiconductors, EMIS Datareviews Series No. 23, 1998, pp. 440-446.
Honda et al.,Selective Area Growth of GaN Microstructures on Patterned(111)and(001)Si Substrates, 4thEuropean Workshop on GaN, Nottingham, UK, Jul. 2-5, 2000.
International Search Report, PCT/US00/27354, Jan. 24, 2001.
International Search Report, PCT/US00/40724, Feb. 27, 2001.
International Search Report, PCT/US99/04346, Jun. 9, 1999.
International Search Report, PCT/US99/12967, Oct. 18, 1999.
International Search Report, PCT/US99/27358, Apr. 28, 2000.
International Search Report, PCT/US99/28056, Apr. 26, 2000.
Ishiwara et al.,Lateral Solid Phase Epitaxy of Amorphous Si Films on Si Substrates With SiO2Patterns, Applied Physics Letters, vol. 43, No. 11, Dec. 1, 1983, pp. 1028-1030.
Jastrzebski,SOI by CVD: Epitaxial Lateral Overgrowth(ELO)Process-Review, Journal of Crystal Growth, vol. 63, 1983, pp. 493-526.
Joyce et al.,Selective Epitaxial Deposition of Silicon, Nature, vol. 4840, Aug. 4, 1962, pp. 485-486.
Kapolnek et al., “Anisotropic Epitaxial Lateral Growth in GaN Selective Area Epitaxy”, Appl. Phys. Lett. 71 (9), Sep. 1, 1997, pp. 1204-1206.
Kapolnek et al., “Selective Area Epitaxy of GaN for Electron Field Emission Devices”, Journal of Crystal Growth, 5451, 1996, pp. 1-4.
Kato et al., “Selective Growth of Wurtzite GaN and Al×Ga1-×N on GaN/Sapphire Substrates by Metalorganic Vapor Phase Epitaxy”, Journal of Crystal Growth, 144, 1994, pp. 133-140.
Kinoshita et al.,Epitaxial Lateral Overgrowth of Si on Non-Planar Substrate, Journal of Crystal Growth, vol. 115, 1991, pp. 561-566.
Kuznia et al.,Influence of Buffer Layers on the Deposition of High Quality Single Crystal GaN Over Sapphire Substrates, J. Appl. Phys., vol. 73, No. 9, May 1, 1993, pp. 4700-4702.
Leo Unmasked by Pendeo-Epitaxy, Compound Semiconductor, Mar. 1999, p 16.
Linthicum et al.,Pendeoepitaxy of Gallium Nitride Thin Films, Applied Physics Letters, vol. 75, No. 2, Jul. 12, 1999, pp. 196-198.
Linthicum et al.,Process Routes for Low-Defect Density GaN on Various Substrates Employing Pendeo-Epitaxial Growth Techniques, MRS Internet Journal of Nitride Semiconductor Research, Fall Meeting of the Materials Research Society, vol. 4S1, No. G4.9, Nov. 30, 1998-Dec. 4, 1998.
Mahajan et al.,Principles of Growth and Processing of Semiconductors, WCB McGraw-Hill, 1999, pp. 268-275, 352-365.
Marchand et al.,Microstructure of GaN Lat

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