Seam pressure sensor employing dielectically isolated resonant b

Details Seam pressure sensor employing dielectically isolated resonant b Seam pressure sensor employing dielectically isolated resonant b

1994-08-18

1995-12-12

Chilcot, Richard

Measuring and testing

Fluid pressure gauge

Vibration type

73702, G01L 900, G01L 1300

Patent

active

054739446

ABSTRACT:
A pressure transducer comprising at least one diaphragm formed in a wafer of semiconducting material, the at least one diaphragm being spaced from a first surface of the wafer, a first layer of semiconducting material disposed over the at least one diaphragm, the first layer forming at least one resonating beam over the at least one diaphragm, and a plurality of resistor elements formed from a third layer of semiconducting material disposed over the at least one resonating beam, and isolation means for dielectrically isolating the at least one resonating beam from the at least one diaphragm.

REFERENCES:
patent: 4730496 (1988-03-01), Knecht et al.
patent: 4813271 (1989-03-01), Greenwood
patent: 5003825 (1991-04-01), Lew
patent: 5060526 (1991-10-01), Barth et al.
patent: 5142912 (1992-09-01), Frische
patent: 5165289 (1992-11-01), Tilmans
patent: 5286671 (1994-02-01), Kurtz et al.

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