Sealing system for a movable vacuum chamber of a charged particl

Electric heating – Metal heating – By arc

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219121EL, 219121EX, B23K 1500

Patent

active

043586570

ABSTRACT:
A system for sealing the working vacuum chamber of a charged particle beam machine which is movable with respect to a workpiece is disclosed. The system includes a housing with a central compartment having wire-shaped elements urged against the workpiece to provide a seal therebetween, and lateral compartments, each having a packing of sealing material which is biased against the workpiece surface of a spring arrangement. Rollers and a flexible lip seal arrangement having a flexible sheath of synthetic rubber are also disclosed.

REFERENCES:
patent: 2590084 (1952-03-01), Bernard
patent: 3136882 (1964-06-01), Radtke
patent: 3219792 (1965-11-01), Pederson
patent: 3291349 (1966-12-01), McKellar et al.
patent: 3435185 (1969-03-01), Gerard
patent: 3719791 (1973-03-01), Peyrot
patent: 3757076 (1973-09-01), Peyrot
patent: 3814443 (1974-06-01), Steigerwald
patent: 4045647 (1977-08-01), Thome
patent: 4072844 (1978-02-01), Sayegh
patent: 4103912 (1978-08-01), Thome
Sciaky "Sciaky Electron-Beam Welder for Distributor Cams", Machinery and Production Eng'g. vol. 122, No. 3152, Apr. 18, 1973, pp. 511-513.

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