Coating processes – Base supplied constituent
Reexamination Certificate
2003-12-12
2010-02-09
Lightfoot, Elena T (Department: 1792)
Coating processes
Base supplied constituent
C427S331000, C427S337000
Reexamination Certificate
active
07658975
ABSTRACT:
Method and structure for minimizing the downsides associated with microelectronic device processing adjacent porous dielectric materials are disclosed. In particular, chemical protocols are disclosed wherein porous dielectric materials may be sealed by attaching coupling agents to the surfaces of pores. The coupling agents may form all or part of caps on reactive groups in the dielectric surface or may crosslink to seal pores in the dielectric.
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Goodner Michael D.
Kloster Grant
Meagley Robert P.
O'brien Kevin P.
Intel Corporation
Lightfoot Elena T
Ortiz Kathy J.
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