Sealing method for reaction gases

Details Sealing method for reaction gases Sealing method for reaction gases

1994-03-02

1995-08-22

Bueker, Richard

Coating processes

Coating by vapor, gas, or smoke

4272555, 4272557, 216 58, C23C 1600

Patent

active

054438608

ABSTRACT:
Reaction gases are prevented from escaping from a reaction chamber through the use of flexible or gas seals between the interface of the reaction chamber and the junction used to connected successive reaction chambers.

REFERENCES:
patent: 4048955 (1977-09-01), Anderson
patent: 4601260 (1986-07-01), Ovshinsky

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