Sealing method and apparatus for vacuum treatment of support for

Details Sealing method and apparatus for vacuum treatment of support for Sealing method and apparatus for vacuum treatment of support for

1997-04-10

1999-02-02

Tran, Hien

Adhesive bonding and miscellaneous chemical manufacture

Methods

Surface bonding and/or assembly therefor

156285, 118718, 118719, 118733, 425363, 425385, 430501, 430532, 430533, B32B 3100

Patent

active

058659323

ABSTRACT:
In a method in which a thin-film support is continuously led into a vacuum chamber from the atmospheric air, subjected to surface treatment and led-out to the atmospheric air again, a pneumatical cutoff portion of a leading-in and leading-out section is constituted by seal roller sets each of which is formed by aligned pairs of leading-in rollers and leading-out rollers which are close to each other through slight distances, and the support is led-in and led-out while lapped at an angle of from 30 to 150 degrees around the pair of rollers nearest to the atmospheric air of the seal roller sets.

REFERENCES:
patent: 2989026 (1961-06-01), Gardner et al.
patent: 3158507 (1964-11-01), Alexander et al.
patent: 4021179 (1977-05-01), Pira et al.
patent: 4234300 (1980-11-01), Yamagisi et al.
patent: 5000114 (1991-03-01), Yanagi et al.
patent: 5314539 (1994-05-01), Brown et al.
patent: 5326689 (1994-07-01), Murayama

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