Sealing assembly, a lithographic projection apparatus, and a...

Details Sealing assembly, a lithographic projection apparatus, and a... Sealing assembly, a lithographic projection apparatus, and a...

2007-08-14

2007-08-14

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000

Reexamination Certificate

active

10875511

ABSTRACT:
A sealing assembly for sealing a slit between two regions in a lithographic apparatus is disclosed. The assembly includes a vacuum pumping device that extends substantially in a longitudinal slit direction for at least partially preventing particle transmission in a transversal slit direction.

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patent: 0 295 616 (1988-12-01), None
patent: 1 306 592 (2003-05-01), None
patent: WO 01/84241 (2001-11-01), None

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