Sealed micromachined vacuum and gas filled devices

Details Sealed micromachined vacuum and gas filled devices Sealed micromachined vacuum and gas filled devices

1993-10-26

1996-02-20

Coles, Sr., Edward L.

Electric lamp and discharge devices

With gas or vapor

Incandescent filament lamp

H01K 150

Patent

active

054931770

ABSTRACT:
A surface and/or bulk micromachined hermetically sealed cavity containing at least one suspended structure in a low pressure ambient, and the associated fabrication method. The cavity is bounded by a thin-film membrane and a substrate which may have a recess. The method can be used for the production, for example, of thermionic-emission vacuum tubes, gas filled tubes and electromechanical devices. In vacuum tubes the cathode is a suspended refractory filament. Other electrodes may also be suspended. In electromechanical devices the suspended members may be cantilever beams capable of low friction motion.

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