Sealed chamber with heating lamps provided within transparent tu

Details Sealed chamber with heating lamps provided within transparent tu Sealed chamber with heating lamps provided within transparent tu

1995-05-26

1997-06-03

Jeffery, John A.

Electric resistance heating devices

Heating devices

Radiant heater

219390, 118 501, 118724, 373127, 427557, H01L 21205, F26B 1900, F27D 100

Patent

active

056363206

ABSTRACT:
A reactor is provided for heating a workpiece in a sealed environment. The reactor has a chamber with a gas inlet port, a gas outlet port, and at least one tube for receiving a heat source. The tube passes from outside the chamber into the inside of the chamber without breaking the chamber seal. Alternately, the tubes may be used for treating the workpiece with light, in combination with or instead of heat treatment.

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